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New Year, New You in 2012

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Please click on the links below to explore Systems configurations and other equipment for sale.

• Novellus, Concept One, #734 System
• Novellus, Concept One, #770 System
• Novellus, Concept One, #852 System
• Lam 4520i, ER
• KLA-Tencor Surfscan, Model SP1, ER
• Axcelis-Eaton, GSD-200EE, ER
• Axcelis-Eaton, GSD-200E, MS
• Varian Sputtering System, 5 Inch 3190
• Significant Parts for Semiconductor Equipment
• Significant Parts for Semiconductor Equipment #2
• Equipment and Parts Wanted

Contents

• Semiconductor Equipment, Fully Refurbished
• Fully Refurbished Applied Materials P5000, Nitride System, 150MM (6")
• Fully Refurbished Applied Materials P5000, TEOS System, 150MM (6")
• Gasonics Aura 1000 Ashing System, 150mm (6"), Refurbished
• AMAT XR80 Ion Implanter Parts
• Novellus System Parts
• Ion Implanters for Liquidation
• Applied Materials Parts List
• R & D Equipment for Semiconductor Processing
• Rotary Polishing Wheel

The following equipment can be ordered with a lead time of 3-4 weeks upon receipt of order. All equipment are subject to availability at time and date of inquiry. Please click here to request for details.

Equipment List

• Applied Materials, P5000, 3 chamber CVD, with pumps
• Applied Materials, P5000, 2 chamber Etch with pumps
• Applied Materials, 83xx Etch system with pumps
• LAM, 490, 590 etch system with pumps
• LAM, 44xx, 45xx etch system with pumps
• Gasonics, Aura 1000 with pump
• Gasonics, AE2001 with pump
• Gasonics, L3510 with pump

Vacuum pumps are rebuilt Edwards QDP80/250 or QDP80.

Contents

System Configuration

• P5000 Mark II mainframe
• Configured for 150mm (6") wafers, SMF
• Standard remote frame
• 380VAC/50Hz/3 phase
• Expanded gas panel with mini-controller
• Phase III robot I/O wafer sensor
• 8 slot storage elevator
• Bolt down loadlock with particle reduction kit
• 21 slot VME with 3 1/2" FDD
• Hardware Y2K compliant
• VGA monitor/light pens through the wall
• Stand Alone Remote Monitor
• Three (3) PECVD standard chamber
• One (1) AMAT heat exchanger
• Three (3) ENI-12B RF generators
• Phase IV RF Match
• Unit 1660 MFC's
• Dual spring type throttle valve
• Edwards pump interface
• Pump(s) quoted separately
• Installation quoted separately

Chambers

• Chamber A: PECVD standard chamber, process Kit, 150mm
• Chamber B: PECVD standard chamber, process Kit, 150mm
• Chamber C: Blank
• Chamber D: PECVD standard chamber, process Kit, 150mm

PETEOS Chambers (A,B,D)

• Standard universal chambers
• 150mm process kit (100% New)
• ENI OEM 12B RF Generator with Phase IV match
• Standard throttle valve
• 100 Torr manometer
• Up to 4 Unit 1660 MFC's per chamber
• Gas panel rebuilt with New lines and re-calibrated MFC's, it looks NEW

Note: Subject to availability at time and date of inquiry.

Contents

System Configuration

• P5000 Mark II mainframe
• Configured for 150mm (6") wafers, SMF
• Standard remote frame
• 380VAC/50Hz/3 phase
• Expanded gas panel with mini-controller
• Phase III robot I/O wafer sensor
• 8 slot storage elevator
• Bolt down loadlock with particle reduction kit
• 21 slot VME with 3 1/2" FDD
• Hardware Y2K compliant
• VGA monitor/light pens through the wall
• Stand Alone Remote Monitor
• Three (3) universal PETEOS chambers
• One (1) AMAT heat exchanger
• Three (3) ENI-12B RF generators
• Phase IV RF Match
• Unit 1660 MFC's
• Dual spring type throttle valve
• Edwards pump interface
• Hot Box IV
• Schumacher TEOS Delivery Cabinet (canisters not included)
• Pump(s) quoted separately
• Installation quoted separately

Chambers

• Chamber A: PETEOS/USG chamber, process Kit, 150mm
• Chamber B: PETEOS/USG chamber, process Kit, 150mm
• Chamber C: Blank
• Chamber D: PETEOS/USG chamber, process Kit, 150mm

PETEOS Chambers (A,B,D)

• Standard Universal PETEOS chambers
• 150mm process kit (100% New)
• ENI OEM 12B RF Generator with Phase IV match
• Standard throttle valve
• 100 Torr manometer
• Up to 4 Unit 1660 MFC's per chamber
• Gas panel rebuilt with New lines and re-calibrated MFC's, it looks NEW

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.

Basic Configuration:

• Anodized Al chamber with quarts chamber window
• Pic & place robot wafer handling
• Load/unload cassette elevator
• End point detection
• Microprocessor interface pressure control
• Magnetron power supply
• Lamp alarm board
• Lamps and Quartz installed
• Throttle valve included
• Export packaging included
• Edwards QDP80/250 pump/blower set included

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.

Reference: ColeKeef324

Note 1: All of the above parts are believed to be in perfect condition.

Note 2: Miscellaneous cables and gauges thrown in at no additional cost with purchase of all items listed above.

Note 2: All products are subject to availability at time and date of inquiry.

If interested,   please click here.  Please include Reference.

If interested,   please click here.

Note: All items are subject to availability at time and date of inquiry.

Hot Softwares

List and Descriptions

Eaton NV 3206

• Medium Current
• Quantity: 2 Ea
• Serial Nos: 300 and 344

Varian 350D

• Quantity: 1 Ea
• Serial No. 00508570
• Comes with 2 end stations: 5 inch and 4 inch
• Software version 4.4.2.1

Varian CF3000

• Quantity: 1 Ea

Eaton NV 10-80

• High Current
• Quantity: 1 Ea
• Serial No. 0350245
• All latest Eaton revisions included
• 5 Inch Clampless
• Flood Gun 4 Power Supply
• Turbo Pumped Source

Eaton NV 10-160, Rebuilt

• Quantity: 2 Ea
• Serial Nos: 11 and 52
• One with 6 inch manual load and the other with 6 inch clampless AT4

Submit offer per system or entire package!!!

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.

Hot Softwares

• 3M Satin Finishing Material
• Stainless steel material for 3/32" shank and related parts
  • Specifications:
    • 7/8 X 3/8 X 3/32
    • 7/8 X ¼ X 3/32

Hot Softwares

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OLM Enterprises
Semiconductor Equipment Resource Center

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Copyright ©1999 OLM Enterprises

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