Mass Flow Controller List, Gr-3
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Brooks Instruments, Models 5850E and 5850EM
Item
Gas
Flow
Qty
Comments
1
H2
1 Slm
2
New, Boxed
2
H2
1 Slm
1
Rebuilt
3
SiH4
50 Sccm
2
Rebuilt
4
SiH4
200 Sccm
1
Rebuilt
5
O2
300 Sccm
1
Rebuilt
6
N2
1 Slm
2
Rebuilt
7
PH3
100 Sccm
1
Rebuilt
8
PH3
500 Sccm
2
Rebuilt
9
HBR
300 Sccm
1
Rebuilt
10
HCL
300 Sccm
1
Rebuilt
11
NH3
300 Sccm
1
Rebuilt
12
NH3
500 Sccm
2
Rebuilt
13
TMB
15 Sccm
1
Rebuilt
14
ARGON
20 Slm
1
Rebuilt
15
O2
10 Slm
1
Rebuilt
Item
Gas
Flow
Qty
Comments
1
TMB
15 Sccm
1
Clean
2
SiCL4
30 Sccm
4
Clean
3
SF6
50 Sccm
1
Clean
4
SiH4
50 Sccm
2
Clean
5
SiH2CL2
50 Sccm
2
Clean
6
75%SiH4/PH3
50 Sccm
1
Clean
7
PH3
100 Sccm
1
Clean
8
HCL
100 Sccm
4
Clean
9
75%SiH4/PH3
100 Sccm
2
Clean
10
SiH4
100 Sccm
3
Clean
11
SiH2CL2
100 Sccm
1
Clean
12
SiH4
200 Sccm
2
Clean
13
NH3
300 Sccm
3
Clean
14
O2
300 Sccm
2
Clean
15
CHF3
300 Sccm
1
Clean
16
SiH4
400 Sccm
4
Clean
17
NH3
500 Sccm
1
Clean
18
N2
1 Slm
5
Clean
19
N2
2 Slm
2
Clean
20
O2
2 Slm
3
Clean
21
NH3
500 Sccm
2
5850EM, Clean
22
BCL3
50 Sccm
3
5850EM, Clean
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R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
Item
Equipment
Model
Notes
Voltage/Current
Dimensions
1
SK Vapor Dryer
51028
IPA Dryer
240V/70A
45W X 24D X 100H
2
AEP Stripper
UC-7550
Flat Panel Stripper
208V/200A
74W X 50D 94H
3
O3 Detector
IN 2000-3
Ozone Monitor
120V/1.5A
N/A
4
Steag Wet Etch
FPD-400
Wet Etch with Robot
208V/60A
71W X 51L X 65H
5
AKT RIE
1600-ETCH
2 Etch Chambers
208V/240A
Cluster Tool
6
AKT PVD
1600-PVD
2 Sputter Chambers
208V/320A
Cluster Tool
7
Steag Coater
FPD 400
Resist Coater/Developer
208V/175A
115W X 82D X 73H
8
Tamarack
T-300
Photo Lithography Tool
208V/15A
67W X 59D X 103H
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
Bearing vibration
Rolling element bearing condition (BEARCON)
Shaft vibration (X/Y)
Temperature
Process parameter
Balancing
One (1) plane
Two (2) planes
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Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
3M Satin Finishing Material
Stainless steel material for 3/32" shank and related parts
Specifications:
7/8 X 3/8 X 3/32
7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
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OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
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E-mail: info@semiconweb.net
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