Item #

EQUIPID

SYSTEM_TYPE

MANUFACTURE

MODEL_NUM

SERIAL #

ASSET_NUM

Aligner

1

P32PE

PE ALIGNER

SVGL

552HT

I4712

1244

2

P41PE

PE ALIGNER

SVGL

552HT

B4661

1367

3

P43PE

PE ALIGNER

SVGL

554HT

C5552

1368

4

P44PE

PE ALIGNER

SVGL

550

B3701

1365

5

P45PE

PE ALIGNER

SVGL

552

B3321

1369

6

P46PE

PE ALIGNER

SVGL

550R

2470R

1364

7

P47PE

PE ALIGNER

SVGL

552HT

2651R

1086

8

P48PE

PE ALIGNER

SVGL

552HT

I4612

1435

9

P51PE

PE ALIGNER

SVGL

552HT

E4791

1438

10

P35PE

PE ALIGNER

SVGL

552HT

K4722

1993

11

P31PE

PE ALIGNER

SVGL

552HT

K4422

1995

12

P33PE

PE ALIGNER

SVGL

552HT

C4581

1994

13

P34PE

PE ALIGNER

SVGL

552HT

D4081

1996

14

P37PE

PE ALIGNER

PERKIN ELMER

552HT

C5942

1992

15

P38PE

PE ALIGNER

SVGL

552HT

L3351

1998

16

P52PE

PE ALIGNER

SVGL

552HT

L4922

1168

17

P53PE

PE ALIGNER

SVGL

552HT

L4232

1437

18

P55PE

PE ALIGNER

PERKIN ELMER

552HT

L4232

0935

Track

19

P31CTR

COATER

SVG

8100

600311

1241

20

P37CTR

COATER

SVG

8100

G5100

0648

21

P42CTR

COATER

SVG

8100

601988

1231

22

P44CTR

COATER

SVG

8100

G5101

1232

23

P46CTR

COATER

SVG

8100

074-137

1361

24

P34DEV

DEVELOPER

SVG

8100

1900

0190

25

P38DEV

DEVELOPER

SVG

8100

034-303S

1379

26

P41DEV

DEVELOPER

SVG

8100

99-4164-13

1371

27

P43DEV

DEVELOPER

SVG

8100

99-4164-14

1372

28

P45DEV

DEVELOPER

SVG

8100

99-4164-15

1082

29

P51DEV

DEVELOPER

SVG

8100

99-4164-16

1442

30

P52DEV

DEVELOPER

SVG

8100

99-4164-17

1408

31

P32ACTR

NEGCOAT

SVG

8100

99-4164-12

1816

32

P36DEV

developer

SVG

8100

98-04010-15

1406

33

B1COT

SVG Resist Coater

SVG

214300

86700-1078

2143

34

E1TAZ

Spin On Glass

SEMIX

TR613200

686079

1967

Furnace

35

FTEL

Furnance

TEL SAGAMATI

UL-260-08

9X0165

1103

36

DAX

Four Tube Horizontal Furnace

LINDBERG

260

610517

1471

37

DBX

Four Tube Horizontal Furnace

LINDBERG

260

610520

1953

38

DCX

Four Tube Horizontal Furnace

LINDBERG

260

610518

1952

39

DDX

Four Tube Horizontal Furnace

LINDBERG

260

610522

1941

40

DGX

Four Tube Horizontal Furnace

LINDBERG/TEMPRESS

260 DDC / 260-014

848941 / 610145

1931

41

DIX

Four Tube Horizontal Furnace

LINDBERG/TEMPRESS

260 DDC/260-

848540 / 610103

1921

42

DJX

Four Tube Horizontal Furnace

LINDBERG/TEMPRESS

260 DDC/260

610102 / 610102

1917

43

DZX

Four Tube Horizontal Furnace

TEMPRESS

TS 61004

97-K024

0662

44

F2PWS

Furnance

PACIFIC WESTERN SYSTEMS

DA30448

12574

1867

Etcher/Wet Oxide

45

E1SNK

Wet Oxide Etch

SANKYO

AWC-662S

SNY1480M

0166

46

E13LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1065

1864

47

E14LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1053

1972

48

E15LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1136

1863

49

E16LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1269

0552

50

E18LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1207

1973

51

E19LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1012

1861

52

E110LAM

Oxide Etcher

LAM RESEARCH

580 AUTOETCHER

1166

1245

53

E21 X PHOS

Wet Nitride Etch

NOAH PRECISION

1008/5

117594

1307

Etcher/Wet Metal

54

E71ATIW

Wet Metal Etch

NOAH PRECISION

62100

1000/4

0621

55

E71 X MET

Wet Metal Etch

SCP

UNKNOWN

UNKNOWN

1906

Etcher/Wet Silicon

56

E72 X DEF

Wet Silicon Etch

NOAH PRECISION

1000

NP179295

2383

Etcher/Poly-Oxide

57

E5K5AME

Silicon Etcher

APPLIED MATERIALS

P5000

6160

1402

58

E26AME

Poly / Oxide Etcher

APPLIED MATERIALS

8100

300701

1982

59

E76AME

Aluminium Etcher

APPLIED MATERIALS

8300

013901

0637

60

E78AME

Aluminium Etcher

APPLIED MATERIALS

8300

268901

1463

Etcher/Nitride

61

E63BSN

Nitride Etcher

BRANSON IPC

2100 SERIES

M905631-1

1909

62

E21BSN

Nitride Etcher

BRANSON IPC

2100 SERIES

10002288

2518

63

E61LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1194

1287

64

E62LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1179

0831

65

E63LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1019

1288

66

E64LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1085

1865

67

E65LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1229

1114

68

E69LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1110

1290

69

E67LAM

Poly / Nitride

LAM RESEARCH

480 AUTOETCHER

1033

1115

70

E22 X SUF

Wet Resist Strip

WAFAB

VLFRA102-28-72

UNKNOWN

0988

71

E61 X RCA

Wet Resist strip

NOAH PRECISION

UNKNOWN

UNKNOWN

1492

72

E62 X PRS

Wet Resist Strip

SANTA CLARA PLASTICS

UNKNOWN

UNKNOWN

1275

73

E63 X RCA

Unknown

WAFAB

UNKNOWN

UNKNOWN

2306

74

E62 X SOX

Unknown

Santa Clara Plastic

UNKNOWN

UNKNOWN

1525

Asher

75

E11RAM

Photoresist Asher

RAMCO

6500

7160

2315

76

E13RAM

Photoresist Asher

RAMCO

RAM250

6997

2039

77

E15RAM

Photoresist Asher

RAMCO

6500

7196

2420

78

E17RAM

Photoresist Asher

RAMCO

RAM-6500

7195

2372

79

E61RAM

Photoresist Asher

RAMCO

6500

7241

2371

80

E63RAM

Photoresist Asher

RAMCO

6500

7242

2421

81

G4AMS

APCVD System, Doped

APPLIED MATERIALS

AMS 2100

7002

1101

82

G6AMS

Doped APCVD System

APPLIED MATERIALS

AMS 2100

7635

1892

83

G3AMS

Doped APCVD System

APPLIED MATERIALS

AMS 2100

7490

1895

84

F2SPU

Platinum ,TiW Sputter

VARIAN  3180

983-3053

83145-104

1877

85

F8SPU

AlCu Sputter

VARIAN  3280

983-3252

86587-499

1883

86

F9SPU

SPUTTER

VARIAN  3280

983-3262

86610-517

1153

87

F10 SPU

SPUTTER

VARIAN 3280

9833262

84403348

1152

SRD

88

S209SRD

Spin Rinse Wafer Dryer

SEMITOOL

P226

11984

0746

89

S211SRD

Spin Rinse Wafer Dryer

VERTEQ

1600-55M

34400A

0677

90

F189SRD

Spin Rinse Dryer

SEMITOOL

860-D

Missing

1448

91

F191SRD

Spin Rinse Dryer

SEMITOOL

860-D

Missing

1455

92

F193SRD

Spin Rinse Dryer

SEMITOOL

860-D

5224VTI

1453

93

B195SRD

Spin Rinse Dryer

SEMITOOL

860-D

C6440Q

1417

94

B199SRD

Spin Rinse Dryer

SEMITOOL

860-D

C2621C

1110

95

D164SRD

Spin Rinse Dryer

SEMITOOL

UNKNOWN

1856

96

D185SRD

Spin Rinse Dryer

SEMITOOL

UNKNOWN

1295

97

D187SRD

Spin Rinse Dryer

SEMITOOL

UNKNOWN

1297

98

E157SRD

Spin Dryer

SEMITOOL

ST-260

5173

1389

99

E201SRD

Spin Dryer

VERSATILE TECHNOLOGIES

ST-260

5499

1391

100

E167SRD

Spin Dryer

SEMITOOL

ST-260

5216

1277

101

E169SRD

Spin Dryer

SEMITOOL

ST-260

NA

1279

102

E171SRD

Spin Dryer

SEMITOOL

ST-260

5527

1282

103

E174SRD

Spin Dryer

SEMITOOL

ST-260

5176

1491

104

E181SRD

Spin Dryer

SEMITOOL

ST-260

UNKNOWN

2584

105

E207SRD

Spin Dryer

VERSATILE TECHNOLOGIES

ST-270

11987

0626

106

E177SRD

Spin Dryer

SEMITOOL

ST-260

5164

1282

107

E179SRD

Spin Dryer

SEMITOOL

ST-260

5392

1469

108

E175SRD

Spin Dryer

SEMITOOL

ST-260

5177

1459

Cleaner-Sink

109

S4MEG

Megasonic Cleaner

VERTEQ

ST600-42TL

34401

0679

110

S5MEG

Megasonic Cleaner

VERTEQ

ST600-62T

18214

0916

111

B1ASNK

2 Tank Resist Strip Sink

SANTA CLARA PLASTICS

SCP 3107

Missing

1109

112

E62POLY

Poly Etch ( MOAT Sink )

WAFAB

UNKNOWN

UNKNOWN

1068

113

E22XSUF OLD

Sink

NOAH

UNKNOWN

UNKNOWN

1985

Scrubber

114

F4ASCB

Wafer scrubber  2 track

SILICON VALLEY GROUP

8620SSC

Missing

1903

115

F5ASCB

Wafer scrubber  3 track

SILICON VALLEY GROUP

8620SSC

Missing

1096

116

F1DNS

Spin Scrubber

DAINIPPON SCREEN

SSW629B

54700-8686

2411

117

B1DLAM

Wafer Tape Remove

NEL SYSTEMS

HR8500II

N341196

0169

Metrology

118

M1FTR

Epi Film Thickness

BIORAD

QS300

12330

1845

119

M1RSMP

Resistivity Probe

CREATIVE DESIGN ENG.

CDE RESMAP178

612110178

0587

120

M1FSM

Stress Measureing Tool

FILM STRESS MEASUREMENT

FSM 8800

881314

1884

121

M1PRESNT

Wafer presenter,inspection

H-SQUARE CORP

WP5-AC

003

0159

122

M2PRESNT

Wafer presenter,inspection

H-SQUARE CORP

WP5-AC

3625

0999

123

M3PRESNT

Wafer presenter,inspection

H-SQUARE CORP

WP6-AC

3614

1148

124

M1HIT

CD Measurement

HITACHI

S-6000

544-912

1356

125

M2HIT

CD Measurement

HITACHI

S-6000

545-5521

1355

126

M1BBX

Wafer Inspection

IRVINE OPTICAL

I-150

8192

1302

127

M2BBX

Wafer Inspection

IRVINE OPTICAL

I-150

8189

1303

128

M5BBX

Wafer Inspection

IRVINE OPTICAL

I-150

8831

1126

129

M4BBX

Black box inspection

IRVINE OPTICAL

1-150

8193

1300

130

M6BBX

Wafer Inspection

IRVINE OPTICAL

1-150

8191

1089

131

M7BBX

Wafer Inspection

IRVINE OPTICAL

I-150

8188

1299

132

M1MET

Nitride and R/I measurement tool

METIRCON

PC2000

2026

1447

133

M1ADE

Wafer Thickness Measurement

MICRO SENSE

TM8501

8749

1431

134

M6AFT

Film Thickness measurment

NANOMETRICS

210

7775

1902

135

M8AFT

Thickness Measurement

NANOMETRICS

210XP

7612

1249

136

M7AFT

THICKNESS MEASUREMENT

NANOMETRICS

NANOSPEC AFT

7776

1914

137

P1DEV

BATCHDEV

NOAH PRECISION

4000

0644

138

M303

Thickness Measurement

PROMETRIX

FT-500

9104F3

2034

139

D2ELP

Thickness Measurement

RUDOLP

FE-III/D

10710

0195

140

M4RFT

Resist Film Measurement

RUDOLPH

RFT-PHOTO

8046

1071

141

M2RFT

Resist Film Measurement

RUDOLPH SCIENTIFIC

FTM/STD

8034

1373

142

M3RFT

Unknown

RUDOLPH REASURCH

RFT PHOTO

8046

1415

143

M1TEN

WDQC measurement tool

TENCOR

SURFSCAN 4500

687-158

1886

144

M2TEN

Metal thinckness gage

TENCOR

M-GAGE 300

0785-383

1100

145

M3TEN

WDQC measurement tool

TENCOR

SURFSCAN 4500

588-243

1443

146

M4TEN

Metal Thickness Guage

TENCOR

M-GAGE 300

019610

0841

147

M1FPP

Resistivity

VEECO

AP-150

138

1128

148

M2FPP

Resistivity

VEECO

EPP5000

699C

1846

149

M9BBX

Wafer Inspection

WED

MACRO SPEC

6312-PCST

0639

150

M1OST

Optistation Inspection

NIKON

3A

20466

1090

151

M2OST

Optistation Inspection

NIKON

3A

20424

1081

152

M3OST

Optistation Inspection

NIKON

3A

20481

0759

153

M3BBX

Wafer Inspection

IRVINE OPTICAL

I-150

8186

1305

154

P3UWH

Wafer Handler

IRVINE OPTICAL

TM8501

8703

1091

155

P4UWH

Wafer Handler

IRVINE OPTICAL

TM8501

8701

1093

156

P5UWH

Wafer Handler

IRVINE OPTICAL

TM8501

8702

1092

157

M2PRO

Film Thickness

PROMETRIX

FT600

911OFT600-01

0815

Oven

158

E13OVN

Oven

BLUE M

TOUCHMASTER

UNKNOWN

1962

159

E61OVN

Oven

BLUE M

TOUCHMASTER

UNKNOWN

1911

160

E71OVN

Oven

DESPATCH

LCCI-54

133858

1084

Tools

161

F1MGI

Wafer transfer for PWS

MATRONIX

EUREKA

PA72-50M

1868

162

D27MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691306

0581

163

D28MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691306

0582

164

D29MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691310

0583

165

D30MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691308

0584

166

D31MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691309

0585

167

D32MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691305

0586

168

D33FWTS

Wafer Transfer

FORTREND

F5350

0697-1141

0701

169

D34MGI

Wafer Transfer

MGI

ETII-6910K-5-U

691356

0804

170

D35MGI

Wafer Transfer

MGI

ETII-6910K-5-U

M000034

0818

171

E71MGI

Wafer Transfer

MACTRONICS

UKA-525

9312134699

1907

172

E61PNX

Wafer Transfer Tool

MGI SYSTEMS

PA72-50M

587051

1497

173

F1PRI

Boat loader for PWS 2C & 2D

PRI AUTOMATION

PRI5100

0785047

1106

174

MKS01

Rate of Rise checker

MKS

UNKNOWN

0018943

0757

175

M20BBX

Wafer Inspection

UNKNOWN

I150

64825

1007

Test

176

KLA42

Prober

KLA

1007

2127019

2389

177

KLA40

Prober on TB08 OLI System

KLA

1007

2122024

2343

178

KLA35

Prober on B07INK

KLA

1007

2117013

2346

179

N/A

Probe Card Analyzer

APPLIED PRECISION

PRECISION POINT VX

4083

0660

180

T504

Microscope

NIKON

Compound

8412

2317

181

T507

Microscope

NIKON

COMPOUND

216813

2363

182

N/A

Cable Interface

DEC

VAX 3300

N113327

1207

183

T1

System Analyzing

TADIVAC

TADIVAC2000

960205

0319

184

T2

System Analyzing

TADIVAC

TADIVAC2000

960208

0603

185

T3

System Analyzing

TADIVAC

TADIVAC2000

70901

0708

186

T4

System Analyzing

TADIVAC

TADIVAC2000

70900

0709

187

T5

System Analyzing

TADIVAC

TADIVAC2000

61205

0635

188

T6

System Analyzing

TADIVAC

TADIVAC2000

61207

0696

189

T7

System Analyzing

TADIVAC

TADIVAC2000

960202

0598

190

T8

System Analyzing

TADIVAC

TADIVAC2000

61208

0659

191

T1BTS

Mix Signal Tester

BASIC TEST SYSTEM

MODEL ONE

9060

2542

192

T3BTS

Mix Signal Tester

BASIC TEST SYSTEM

MODEL ONE

9062

2541

193

T12AXIN

2 Head Mixed Signal

FAIRCHILD

5582E

1003

2543

194

T3KTH

1 Head Parametric

KEITHLEY

S400

QMO2834

0530

195

T01KTH

2 Head Parametric

KEITHLEY

350S

QMO1530

1752

196

T2KTH

2 Head Parametric

KEITHLEY

S350I

QMO1732

1749

197

T1MCT

1 Head Mixed Signal

MCT

2000

119

2545

198

T3MCT

1 Head Mixed Signal

MCT

2020

120

2546

199

T4MCT

1 Head Mixed Signal

MCT

2010

199

2547

200

T3MIC

Microscope

NIKON COMPOUND

MANUAL STAGE

217099

2548

201

T9MIC

Stereo Scope

IRVINE OPTICAL / LEICA

ULTRASTATION 3B

8567

2360

Unidentified

202

DHIPOX1

High Pressure Oxidation

GASONICS

H43-95-6003

11005

0878

203

Z1EVE

MASK CLEANER

EVERGREEN

10

1899

0312

5" line list additionals

204

M1AFT

Wafer Film Measurement

NANOMETRICS

200 FILM THICKNESS

7778

1964

205

D183SRD

Spin Rinse Dryer

SEMITOOL

UNKNOWN

1841

206

M5AFT

Film thickness measurement tool

NANOMETRICS

200 AFT

0785-383

1870

207

E176SRD

Spin Rinse Dryer

SEMITOOL

UNKNOWN

208

F6SPU

Sputter

VARIAN  3190

983-3153

84282-248

1881

209

EMSE1

Wet Metal Etch

DNS

SPW612A

55530-9022

0212