Tegal Parts List, Turbo Balancing System, Polishing Wheels, and R&D Semiconductor Equipment
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Tegal Parts List
Note: The following is a list of used parts for Tegal etchers.
| Item
| Description
| Part Number
| Qty
| Comments
|
| 1
| Main Controller
| CD 1043-00205
| 6
| |
| 2
| Main Controller
| CD 1043-00205RW
| 3
| |
| 3
| Main Controller
| CD 1043-00203
| 1
| |
| 4
| Main Controller
| CD 1043-00204RW
| 1
| |
| 5
| End Point Detector
| CD 1039-00102
| 2
| |
| 6
| End Point Detector
| CD 1039-00102RW
| 1
| |
| 7
| End Point Detector
| CD 1039-00105
| 1
| |
| 8
| End Point Detector
| CD 1039-00106
| 1
| |
| 9
| End Point Detector
| CD 1039-00401
| 1
| |
| 10
| End Point Detector
| CD 1039-00402
| 1
| |
| 11
| End Point Detector
| CD 1039-00403
| 1
| |
| 12
| End Point Detector
| CD 1039-00403RW
| 1
| |
| 13
| Liquid Delivery
| N/A
| 1
| 250 Sccm
|
| 14
| Gas Module
| N/A
| 1
| 125 Sccm
|
| 15
| Gas Module
| N/A
| 1
| 250 Sccm
|
| 16
| Gas Module
| N/A
| 1
| 500 Sccm
|
| 17
| Gas Module
| N/A
| 1
| 125 Sccm, He
|
| 18
| Gas Module
| N/A
| 1
| 250 Sccm, N2
|
| 19
| Gas Module
| N/A
| 1
| 100 Sccm, CL2
|
| 20
| Gas Module
| N/A
| 1
| 50 Sccm, SF6
|
| 21
| T-1000 RF Power Supply, 13.56 MHZ
| N/A
| 1
| |
| 22
| T-1000 RF Power Supply, 1000W, 13.56 MHZ
| CR 1057-00101
| 1
| |
| 23
| T-1000 RF Power Supply, 1000W, 13.56 MHZ
| CR 1057-00101RW
| 1
| |
| 24
| AC Module
| CE 1028-w00048
| 1
| |
| 25
| AC Module
| CE 1028-00102
| 1
| |
| 26
| AC Module
| CE 1028-00101
| 1
| |
| 27
| DC Module
| 31-148-001
| 2
| |
| 28
| DC Module
| N/A
| 1
| 110V Transport Research
|
| 29
| Gas Controller
| N/A
| 1
| |
| 30
| Pressure Controller
| CG 1041-00302
| 1
| |
| 31
| Pressure Controller
| CG 1041-00201
| 2
| |
| 32
| RF Controller
| CR 1040-00102
| 1
| |
| 33
| RF Controller
| CR 1040-00103
| 1
| |
| 34
| RF Controller
| CR 1040-00105RW
| 1
| |
| 35
| RF Controller
| CRL 1040-00105RW
| 2
| |
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
- Bearing vibration
- Rolling element bearing condition (BEARCON)
- Shaft vibration (X/Y)
- Temperature
- Process parameter
Balancing
- One (1) plane
- Two (2) planes
If interested, please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
- 3M Satin Finishing Material
- Stainless steel material for 3/32” shank and related parts
- Specifications:
- 7/8 X 3/8 X 3/32
- 7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
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Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: info@semiconweb.net
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Semiconductor Equipment Resource Center
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